Dryer

SEMITOOL, VERTEQ dryer is widely used in semiconductor, LED industry

Wash cycle

Drying cycle

Fully automatic washing

The N2 heater can be used for washing and dry cleaning cycle, can set up 10 preset program, each program can have 10 steps

Suitablefor 2 ~ 8 inches Silicon Gallium arsenide, Glass substrate and all kinds of other material 

The rotor can be easily replaced, different size to meet the needs of the users more size, do not need to purchase additional equipment;

• 98% uptime, the most stable semiconductor equipment;

• good granularity index and degree of dry.

•dry water consumption is less than 3 gallons each time, each process time 

not more than 7 minutes;

•Brushless motor, with higher performance